Lifter Bellows

Overview

Lifter Bellows are designed with custom face seals for semiconductor processing equipment. In order to move the silicon wafers being produced, the lifter bellows and actuator assembly produce a leak tight mechanism to transport the wafer. BellowsTech edge welded bellows have low leak rates, custom designs and flexibility for motion. BellowsTech’s goal is to ensure proper wafer placement and seating. With in-house design expertise, our engineers will build a solution to match the speed and size requirements of the application.

Lifter bellows assemblies are available in a variety of materials including AM350, 304L and 316L stainless steel. For applications requiring reduced weight, Titanium is also available.

While BellowsTech offers over eighty standard bellows diaphragms, custom diaphragms can be designed to customer specifications. Contact the factory for more information.

Specifications - Lifter Bellows – PDF
Common Materials	AM350, 347, & 316L SS
Thickness	0.002″ and up every 0.001″
Standard Leak Rate	<1×10^-9 std CC He/sec
Size Ranges
Outside Diameter	0.358″ (9.0932mm) to 22.205″ (564mm)*
Inside Diameter	0.198″ (5.029mm) to 19.921″ (505.99mm)*
Shapes	Round standard. Non-Round Available; Contact Factory.
Length	Up to 96 inches (244 cm)
*For other dimensional requirements, contact the factory

Edge Welded Metal Bellows Diaphragm Specifications

Use the following table as a guide for configuring your metal bellows. BellowsTech currently offers over 80 standard sizes. The list can be sorted by each column, searched through the search box at the top-right and expanded by increasing the number of visible entries. For custom sizes, contact us and our design engineers will work with you to find the best solution.

Diaphragm # Outside
Diameter
(OD) Inside
Diameter
(ID) Mean effective
pressure area
MEA (inches^2) Radial Span
(inches)

0036A 0.358 0.200 0.0611 0.079

0040A 0.396 0.2 0.0697 0.098

0048A 0.477 0.198 0.0895 0.1395

0050A 0.496 0.2 0.0951 0.148

0060A 0.595 0.26 0.1435 0.1675

0067A 0.67 0.394 0.2223 0.138

0075A 0.75 0.26 0.2003 0.245

0082A 0.821 0.548 0.3680 0.1365

0083A 0.827 0.575 0.3859 0.126

0084A 0.838 0.5 0.3515 0.169

0089A 0.892 0.592 0.4324 0.15

0102A 1.022 0.683 0.5708 0.1695

0103A 1.03 0.54 0.4840 0.245

0103B 1.03 0.54 0.4840 0.245

0103C 1.03 0.54 0.4840 0.245

0103D 1.03 0.55 0.4902 0.24

0108A 1.08 0.86 0.7390 0.11

0117A 1.17 0.75 0.7238 0.21

0118A 1.181 0.886 0.8389 0.1475

0124A 1.24 0.66 0.7088 0.29

0133A 1.33 1.015 1.0797 0.1575

0136A 1.355 0.54 0.7051 0.4075

0136B 1.362 1.012 1.1066 0.175

0144A 1.437 0.937 1.1066 0.25

0150A 1.5 1 1.2272 0.25

0151A 1.511 1.186 1.4282 0.1625

0156A 1.56 0.865 1.1547 0.3475

0163A 1.625 0.75 1.1075 0.4375

0163B 1.625 0.937 1.2888 0.344

0165A 1.65 1.24 1.6399 0.205

0174A 1.738 1.363 1.8881 0.1875

0175A 1.75 0.75 1.2272 0.5

0175B 1.75 1 1.4849 0.375

0176A 1.759 1.305 1.8433 0.227

0188A 1.875 0.975 1.5948 0.45

0189A 1.89 1.39 2.1124 0.25

0190A 1.9 1.5 2.2698 0.2

0193A 1.925 1.2 1.9175 0.3625

0195A 1.950 1.557 2.4149 0.1965

0200A 2 1.25 2.0739 0.375

0219A 2.190 1.690 2.9559 0.250

0224A 2.244 1.625 2.9392 0.3095

0225A 2.25 1.5 2.7612 0.375

0244B 2.437 1.937 3.7565 0.25

0245A 2.45 1.65 3.3006 0.4

0260A 2.6 1.78 3.7668 0.41

0260B 2.595 2.185 4.4863 0.205

0263A 2.625 2.125 4.4301 0.25

0265A 2.65 2 4.2456 0.325

0270A 2.7 1.95 4.2456 0.375

0275A 2.75 2.125 4.6664 0.3125

0275B 2.75 2.125 4.6664 0.3125

0275C 2.75 1.65 3.8013 0.55

0276A 2.76 1.965 4.3836 0.3975

0300A 3 2 4.9087 0.5

0300B 3 2 4.9087 0.5

0317B 3.165 2.585 6.4918 0.29

0331A 3.305 2.81 7.3421 0.2475

0331C 3.305 2.81 7.3421 0.2475

0350A 3.5 2.75 7.6699 0.375

0368A 3.675 2.53 7.5599 0.5725

0403A 4.034 3.085 9.9510 0.4745

0403B 4.034 3.085 9.9510 0.4745

0417A 4.17 3.7 12.1613 0.235

0420A 4.2 3.4 11.3411 0.4

0472A 4.72 3.72 13.9867 0.5

0475A 4.75 3.03 11.8847 0.86

0490A 4.9 3.53 13.9536 0.685

0490B 4.903 4.323 16.7131 0.29

0497A 4.97 4 15.7985 0.485

0508A 5.077 4.13 16.6443 0.4735

0545A 5.45 4.95 21.2372 0.25

0572A 5.722 4.472 20.4042 0.625

0588A 5.88 5.12 23.7583 0.38

0675A 6.75 5.542 29.6671 0.604

0728A 7.283 5.906 34.1549 0.6885

0775A 7.75 6.85 41.8539 0.45

0785A 7.85 6.25 39.0363 0.8

0787A 7.874 6.693 41.6649 0.5905

0808A 8.083 7.15 45.5618 0.4665

0925A 9.25 8 58.4263 0.625

0950A 9.5 8.5 63.6173 0.5

1099A 10.99 10.12 87.4997 0.435

1100A 11 9.5 82.5159 0.75

1110A 11.102 9.102 80.1502 1

1200A 12 10 95.0332 1

2221A 22.205 19.921 348.4419 1.142

Typical Industries	Benefits
Semiconductor	Custom Configurations
Automation	Liquid filled assemblies
Photo voltaic	Long Stroke

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Overview

Specifications - Lifter Bellows – PDF

Edge Welded Metal Bellows Diaphragm Specifications

Typical Industries

Benefits

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Find Bellows by Material

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