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Semiconductor Ultra High Vacuum Bellows

BellowsTech has supported the semiconductor and ultra high vacuum (UHV) market since its inception. In semiconductor manufacturing, edge welded bellows are used as flexible penetrations into process chambers. The metal bellows becomes part of the pressure wall of the chamber, holding ultra-high vacuum or moderate positive pressures while also providing motion inside the chamber. This allows manipulation of stages, probes, sample holders, wafer lifters, valves, actuators and other mechanical motion needs inside the pressure vessel.  Edge welded bellows can be integrated into linear and rotary translators as the seal.Association of Vacuum Equipment Manufacturers (AVEM) LogoAmerican Vacuum Society Member logo

BellowsTech edge welded bellows are able to withstand high vacuum applications with low leak rates to ensure a hermetic seal.  Lifter bellows can be customized to the size and shape required of new design or retrofit applications. BellowsTech can hold tight tolerances with the reliability to keep semiconductor equipment operational and reliable.  XYZ manipulators can be manufactured to customer specifications.

UHV bellows collageHigh vacuum bellows can be configured with a variety of end pieces including end plates for welding, CF flanges, KF flanges, ISO flanges as well as custom designs.


BellowsTech also supports the photovoltaic market with its products.  Photovoltaic (PV) equipment, including silicon furnaces, share common features to the semiconductor industry in terms of media, processes and functionality.   Edge welded bellows can also be used in OEM solar applications that require thermal or pressure compensation for the expansion of liquids.


BellowsTech shares resources and know-how with Servometer, a manufacturer of electrodeposited bellows. For information on electrodeposited bellows in ultra high vacuum environments, visit:

http://www.servometer.com/applications/semiconductor-bellows/

Contact BellowsTech today about your application for bellows and bellows assemblies.

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 Edge Welded Bellows for Ultra High Vacuum

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