|In semiconductor and ultra high vacuum (UHV) manufacturing, edge welded bellows are used as flexible penetrations into process chambers. The metal bellows becomes part of the pressure wall of the chamber, holding ultra-high vacuum or moderate positive pressures while also providing motion inside the chamber. This allows manipulation of stages, probes, sample holders, wafer lifters, valves, actuators and other mechanical motion needs inside the pressure vessel. Edge welded bellows can be integrated into linear and rotary translators as the seal.BellowsTech edge welded bellows:
Need More Information?
Not sure bellows are the answer to your application requirement? Please fill in the form below and an engineering specialist in our design team will respond to your question within 24 hours.
Need Help with a Custom Design?