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Semiconductor Ultra High Vacuum Bellows

In semiconductor and ultra high vacuum (UHV)  manufacturing, edge welded bellows are used as flexible penetrations into process chambers. The metal bellows becomes part of the pressure wall of the chamber, holding ultra-high vacuum or moderate positive pressures while also providing motion inside the chamber. This allows manipulation of stages, probes, sample holders, wafer lifters, valves, actuators and other mechanical motion needs inside the pressure vessel.  Edge welded bellows can be integrated into linear and rotary translators as the seal.UHV bellows collageBellowsTech edge welded bellows:

  • are able to withstand high vacuum applications with low leak rates to ensure a hermetic seal.
  • can be customized (lifter bellows) to the size and shape required of new design or retrofit applications
  • can hold tight tolerances with exceptional reliability to keep equipment up and running
  • XYZ manipulators can be manufactured to customer specifications
  • can be configured with a variety of end pieces including end plates for welding, (CF flanges, KF flanges, ISO flanges) as well as custom designs

More Applications:
Photovoltaic (PV) and OEM Solar

Both the Photovoltaic and OEM Solar industries share common reqirements to the semiconductor industry in terms of media, processes and functionality. Use BellowsTech edge welded bellows when thermal or pressure compensation is required for the expansion of liquids.

Download the one page datasheet here:
Bellows for Semiconductor Industry Applications.pdf

See More UHV Solutions:
Electrodeposited Bellows

BellowsTech shares resources and know-how with Servometer, a manufacturer of electrodeposited bellows. For information on electrodeposited bellows in ultra high vacuum environments, visit http://www.servometer.com/applications/semiconductor-bellows/

 

We are a proud members of both the Association of Vacuum Equipment Manufacturers and the American Vacuum Society.

Association of Vacuum Equipment Manufacturers (AVEM) LogoAmerican Vacuum Society Member logo

 

 

Visit us at the following tradeshows

  • SEMICON West 2013, at the Moscone Center in San Francisco, CA, July 7 – 11, Booth #315,
  • SEMICON Europa, in Dresden, Germany, October 8 – 10, Booth # 1439.

We will also be participating in the NCCAVS, SCCAVS, and the AVS 60th International Symposium and Exhibition industry trade shows. Be sure to stop by and talk with one of our helpful design engineers about your application. See our complete tradeshow schedule here.

 

 

 

 

 

 

 


 

 Edge Welded Bellows for Ultra High Vacuum

Why Choose BellowsTech?

Most Popular Products
  • Proprietary diaphragm forming and welding technologies
  • ISO 9001:2008
  • Superior Performance
  • Excellent Service and Lead Time
  • Competitive Pricing

Need More Information?

Not sure bellows are the answer to your application requirement? Please fill in the form below and an engineering specialist in our design team will respond to your question within 24 hours.

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Description of Bellows Requirement

Need Help with a Custom Design?
Complete our online design form and a Technical Sales Engineer will respond to you within 24 hours with helpful advice.

Standard Parts and Sizes are NOW Available
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